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Miba Group provides coating for production of state-of-the-art microchips

On January 13, The Miba Group announced that optical systems with mirrors are needed to direct the extremely short-wave UV light for EUV lithography to the right places and this is where Miba's coating technology comes into play. Under cleanroom conditions and in a high vacuum, a 5 µm (0.005 mm) thick amorphous silic....

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